【摘要】 表征了新合成的热光聚合物bisphenol A-aldehyde resin(BPA-resin)的独特性质。并且利用光刻和反应离子刻蚀技术(RIE)制备成功BPA-resin聚合物的单模条波导.实验结果表明,对于TE和TM偏振,该聚合物波导在1.31μm和1.55μm波长下分别有低达0.43 dB/cm和0.51 dB/cm的传播损耗.在上述波长下,波导的低偏振相关损耗(PDL)小于0.1 dB/cm.因此,是制备可调热光器件的良好导波模快.更多还原

【Abstract】 The unique characteristics of newly synthesized thermo-optical polymer,bisphenol A-aldehyde resin(BPA-resin) has been presented.And the singme-mode channel waveguides based on BPA-resin polymer were fabricated using photolithography and reactive ion etching(RIE) technique.The experimental results exhibit that the polymer waveguide has a low propagation loss of 0.43 dB/cm and 0.51 dB/cm at a wavelength of 1.31 μm and 1.55 μm,respectively,for both TE and TM polarizations.The low polarization dependence loss(PDL) of the waveguide was less than 0.1 dB/cm at above wavelengths,which can be applied in thermal-optical tuned devices.更多还原