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椭偏光度法研究钛掺杂对二氧化硅介孔薄膜的光学性能的影响
Spectroscopic ellipsometry characterization of mesoporous Ti-doped SiO2 films optical properties
【摘要】 采用溶胶-凝胶工艺,以表面活性剂十六烷基三甲基溴化铵CTAB为模板剂,在常温常压下制备出介孔SiO2薄膜和钛掺杂介孔SiO2薄膜。用反射式椭圆偏振光谱仪测试出两种薄膜样品的椭偏参数,选用Cauchy模型对椭偏参数进行了较好的数据拟合,获得了在250~700nm波段光学常数的色散关系。紫外-可见-近红外分光光度计测量结果表明小比例钛下薄膜的吸收增强,透过性降低,光学性能发生较大变化。
【Abstract】 Mesoporous SiO2 and mesoporous Ti-doped SiO2 films are prepared by the template-tailored sol-gel method using the surfactant of cetyltrimethylammonium bromide(CTAB) as the template at ambient pressure.Spectroscopic ellipsometer is used to characterize the optical properties of the films.And the Cauchy model is presented well in fitting spectroscopic ellipsometric data for the film optical constants in the wavelength range of 250~700nm.UV-VIS-NIR transmission spectroscopy results show that the absorbance of mesoporous Ti-doped SiO2 films increases and the transparency decreases compared to mesoporous SiO2 films,and the optical properties of the films change obviously.
【Key words】 sol-gel; mesoporous; spectroscopic ellipsometry; optical constants;
- 【文献出处】 光学仪器 ,Optical Instruments , 编辑部邮箱 ,2007年03期
- 【分类号】O484.41
- 【被引频次】3
- 【下载频次】202