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半透明氮化硅陶瓷的放电等离子烧结制备及性能
PREPARATION AND PROPERTIES OF TRANSLUCENT SILICON NITRIDE CERAMICS BY THE SPARK PLASMA SINTERING
【摘要】 用放电等离子烧结(spark plasma sintering,SPS)技术,以质量分数(下同)为9%氮化铝(AlN),3%氧化镁(MgO)为烧结助剂,在1850℃烧结5min,成功制备了半透明氮化硅(Si3N4)陶瓷。半透明Si3N4陶瓷在中红外波段表现出良好的透过率,最大透过率为66.4%。SPS的快速致密化过程保证了烧结体具有良好的晶体结构,有利于提高透过率。SPS快速的烧结过程和AlN和MgO的加入能够有效抑制烧结过程中Si3N4陶瓷由α相向β相的转变,是制备光学性能良好的Si3N4陶瓷的关键。报道了半透明Si3N4陶瓷的其他性能。光学性能与其他性能的结合,势必大大拓宽Si3N4陶瓷的应用领域。
【Abstract】 Translucent silicon nitride(Si3N4)ceramics were prepared by spark plasma sintering(SPS)α-Si3N4 powder at 1 850℃for 5 min with the addition of 9%AlN and 3%MgO in mass.The translucent Si3N4 ceramics show good optical properties and achieved a maximum transmittance of 66.4%in the medium infrared region.The rapid densification process of the SPS guarantees fine micro-structures in the sintered bodies,which improves the transmittance.The rapid sintering process of the SPS and the presence of AlN and MgO can efficiently retard the transformation fromαphase toβphase,which is the key factor for optical properties of Si3N4 ceramics.Some selected properties of translucent Si3N4 ceramics are reported as well.The combination of optical and other excellent properties will open up new ranges for Si3N4 ceramics applications.
【Key words】 translucent silicon nitride ceramics; transmittance; spark plasma sintering; phase transformation;
- 【文献出处】 硅酸盐学报 ,Journal of the Chinese Ceramic Society , 编辑部邮箱 ,2007年03期
- 【分类号】TQ174.1
- 【被引频次】1
- 【下载频次】348