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Measuring of the maximum measurable velocity for dual-frequency laser interferometer

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【作者】 张志平程兆谷覃兆宇朱健强

【Author】 Zhiping Zhang Zhaogu Cheng Zhaoyu Qin Jianqiang Zhu Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800

【机构】 Shanghai Institute of Optics and Fine Mechanics Chinese Academy of SciencesShanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800Shanghai 201800

【摘要】 <正>There is an increasing demand on the measurable velocity of laser interferometer in manufacturing tech- nologies.The maximum measurable velocity is limited by frequency difference of laser source,optical configuration,and electronics bandwidth.An experimental setup based on free falling movement has been demonstrated to measure the maximum measurable velocity for interferometers.Measurement results show that the maximum measurable velocity is less than its theoretical value.Moreover,the effect of kinds of factors upon the measurement results is analyzed,and the results can offer a reference for industrial ap- plications.

【Abstract】 There is an increasing demand on the measurable velocity of laser interferometer in manufacturing tech- nologies.The maximum measurable velocity is limited by frequency difference of laser source,optical configuration,and electronics bandwidth.An experimental setup based on free falling movement has been demonstrated to measure the maximum measurable velocity for interferometers.Measurement results show that the maximum measurable velocity is less than its theoretical value.Moreover,the effect of kinds of factors upon the measurement results is analyzed,and the results can offer a reference for industrial ap- plications.

【关键词】 interferometermeasurableplicationsbandwidthfallingmirrorelectronicsBraggwafersetup
【基金】 This work was supported by the Optical Science & Technology Project of Shanghai Municipal Science and Technology Commission under Grant No.022261052.
  • 【文献出处】 Chinese Optics Letters ,中国光学快报(英文版) , 编辑部邮箱 ,2007年04期
  • 【分类号】TN249
  • 【被引频次】1
  • 【下载频次】80
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