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激光回馈效应及其传感应用研究的进展

Optical feedback effect and the optical feedback interferometry for sensing application

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【作者】 毛威张书练张连清朱钧李岩

【Author】 MAO Wei,ZHANG Shu-lian,ZHANG Lian-qing,ZHU Jun,LI Yan(The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments,Tsinghua University,Beijing 100084,China)

【机构】 清华大学精密测试技术与仪器国家重点实验室清华大学精密测试技术与仪器国家重点实验室 北京100084北京100084

【摘要】 对基于激光回馈效应的传感应用研究进展进行了综述。由于激光回馈引起激光器功率波动一个条纹对应外部反射镜移动半个光波波长,功率波动深度与传统双光束干涉系统相当,基于该现象的激光回馈干涉仪与传统的干涉仪相比具有相同的相位灵敏度。但其结构简单、紧凑、易准直的特点,引起了国内外科研者浓厚的兴趣,开发了很多全新概念、经济实用的精密测量仪器。对激光回馈效应在位移测量、速度测量、振动测量、距离测量、角度测量和形貌测量中的原理进行了介绍,同时对各传感应用系统进行了评述。

【Abstract】 The laser optical feedback interferometric technique is reviewed as a general tool for remote sensing applications.When an external feedback mirror moves a displacement of half laser wavelength,a fringe of laser output intensity is produced.Compared with conventional interference,optical feedback interferometry has not only similar phase sensitivity and modulation depth ratio,but also inherent simplicity,compactness and robustness,as well as self-aligning capability.So the application of optical feedback interferometry has started to flourish.A few selected examples of application in interferometry were presented,such as a displacement sensor,a velocimeter sensor,a vibration sensor,a range finder,an angle sensor and an imaging system.Experimental results are reported and the overall performances of the sensors are assessed.

【基金】 国家自然科学重点项目(6043810)
  • 【分类号】TN249
  • 【被引频次】23
  • 【下载频次】401
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