【摘要】 利用波长为10.6μm的CO2连续激光诱导化学气相沉积的方法,在模具钢基体上沉积TiN类薄膜。采用XRD、OM、SEM、EDS等手段分析薄膜的组织和相结构。实验表明,当激光功率为600W,扫描速度为2 mm/s时,通过H2、N2和TiC l4之间的化学反应,在模具钢表面获得了均匀致密的枝晶组织,其显微硬度最高可达2500 HV。更多还原

【Abstract】 The TiN thin films were produced on die steel substrate by wavelength of 10.6 m CO2 continual laser chemical vapor deposition(LCVD).The microstructures and morphology of the TiN thin films were characterized by X-ray diffraction(XRD),optical microscope(OM),scanning electron microscope(SEM),and energy disperse spectrometer(EDS).The results indicated that,only when the laser power is 600 W and scanning velocity is 2 mm/s,through the reaction of H2,N2 and TiCl4,the TiN films were deposited on die steel substrate by LCVD.And they have dense dendritic structure.Its micro-hardness is 2500 HV.更多还原