【摘要】 利用磁控溅射制备了银含量在100%至80%之间的单层银铜合金薄膜和TiO2/AgxCu1-x/Ti/TiO2纳米四层膜。利用X射线衍射、扫描电子显微镜、扫描俄歇微探针,分光光度计、红外发射率测量仪对样品进行表征,研究了单层金属膜和多层膜的光学、电学性质随着银含量的变化以及热处理前后薄膜性能的变化。结果表明:相同厚度的合金膜,随着Ag含量的降低,导电性能下降,Ag含量低于80%的合金已不适合作为多层膜的金属层;150℃大气下热处理30min,纯银薄膜性质发生明显变化,明视透过率下降10%,方块电阻由2.5W/□增加至18W/□,红外发射率由0.17增加到0.69。AgCu合金薄膜性质未发生明显变化。方块电阻相近的TiO2/AgxCu1-x/Ti/TiO2纳米多层膜,经250℃大气下热处理40min后,TiO2/Ag/Ti/TiO2和TiO2/Ag80Cu20/Ti/TiO2纳米多层膜的性质变化较小,热稳定性较好,其余的多层膜性质发生较大变化,红外发射率显著增加。更多还原

【Abstract】 A series of single AgCu alloy films and multilayer TiO2/AgxCu1-x/Ti/TiO2 films with different silver concentration are prepared by DC magnetron sputting.X-ray diffraction(XRD),scanning electron microscopy(SEM), scanning Auger microprobe,UV-VIS spectrophotometer,and infrared emissivity measurement are used to investigate the films.The optical,electrical properties of the single layer films and multilayer films before and after heat treatment are studied.The conductivity of alloy films declines with decreasing Ag concentration.If x is lower than 80%,the alloy is not appropriate to be the metallic layer in the multilayer films.Properties of pure silver film are modified after being heated at 150℃ for 30 min in the air.Along with 10% decrease of luminous transparency and an increase of sheet resistance from 2.5Ω/□ to 20Ω/□ the infrared emissivity increases from 0.17 to 0.69.Little changes are observed for alloy films after heat treatment.TiO2/Ag/Ti/TiO2 and TiO2/Ag80Cu20/Ti/TiO2 nano-multilayer films keep good properties after being heated at 250℃ in the air for 40 min,while the nano-multilayer films with other Ag concentration are modified obviously.更多还原