【摘要】 介绍了一种新型的基于迈克尔逊干涉原理的高精度位移传感器,分析了其光学原理、测量电路和信号细分方法。该位移传感器还采用了一种新的光电管排列方法,使得信噪比较传统的光电管排列方法有极大的提高并且更便于光学调整。该传感器的测量分辨率高达5nm,可应用于表面形貌的高精度测量。更多还原

【Abstract】 A high precision displacement sensor based on Michelson interference principle is presented.The optical principle,the measurement circuit and the subdivision method are analyzed.An improved arrangement method for photoelectric cells is applied in the sensor.The detection signal-to-noise ratio of the new method is improved remarkably and it facilitates optical adjustment compared with the traditional methods.The resolution of the high precision displacement sensor is about 5nm and the sensor can be applied in high precision measurement of surface topography.更多还原