【摘要】 在超精密抛光加工过程中,抛光粉参量对抛光质量的影响很大。试验研究抛光粉主要参量随抛光时间的变化规律,得到了适合超精密抛光的抛光粉参量的主要特点。根据抛光原理分析了抛光粉的主要参量对抛光表面的作用机理,提出一种选择适于抛光的合适参量抛光粉的方法。结果表明,利用该方法选择的抛光粉可稳定地加工出高质量的超光滑表面。更多还原

【Abstract】 During the process of ultra precise polishing, the polishing quality i s affected greatly by the parameters of polishing powder. The law of the paramet ers of the polishing powder versus the polishing time is studied and the major f eatures of polishing powder’s parameters for the ultra precise polishing is obta ined through experiments. The action mechanism of polishing powder’s main parame ters on polishing surface is analyzed based on the polishing principle, and the method to select the appropriate parameters’ polishing powder for the ultra prec ise polishing is proposed. The experimental results indicate that the ultra smoo th surface can be produced stably by using the polishing power chosen in this way.更多还原