【摘要】 采用适当的器件工艺和特制2mm厚无附加镀层光学玻璃滤光片,使所研制的绿光Si光电探测器的最大量子效率η达到91%,光响应信噪比(SNR)大于1×104。对该Si光电探测器在零偏下的光电流温度特性进行了测量,并对结果做了较深入的理论分析。更多还原

【Abstract】 With proper device technics and special optical glass filter (2 mm thickness,without covered layer),we improved the primary parameters of the semiconductor photoelectric detectors.The signal-to-noise ratio (SNR) reaches 1×104,and the highest quantum efficiency amounts to 91%.This paper introduced the technics in detail.The temperature characteristic at 0 voltage was measured and analysed.更多还原