【摘要】 用自适应光学系统来校正由大气湍流等产生的波前畸变,能够得到很好的效果。通过对自适应光学系统的工作原理进行研究,提出了一种基于MEMS技术的微小型自适应光学系统校正波前畸变的方法,将MEMS技术应用于变形反射镜,并构建了具体的实验平台,用来校正一种人为产生的波前畸变,且阐述了具体的实验过程。实验结果表明,基于MEMS技术的自适应光学系统能够很好地闭环校正波前畸变,且其体积小、质量轻、校正性能稳定,为自适应光学技术在星载相机上的应用提供了依据。更多还原

【Abstract】 Correction of the wavefront error caused by the turbulence can get better effect with an adaptive optical system.A correction method of the micro-miniature adaptive optical system based on Micro Electromechanical System(MEMS) technology was proposed by analyzing the working theory of the adaptive optical system.An experimental system including deformable mirror based on MEMS technology was designed to correct a factitious wavefront error,and the experimental process was expatiated in detail.The experimental results show that the adaptive optical system can preferably correct the wavefront error through closed loop control,and that its small volume,light weight and steady capability greatly support the application of adaptive optics in space camera.更多还原