【摘要】 本文采用三层光刻工艺制作了基于聚二甲基硅氧烷(Polydimethylsiloxane,PDMS)的V形微分流器。引入牺牲层技术,解决了不同胶层间的界面互融问题,讨论了不同胶层间显影液对图形质量的影响。所制得的分流器工艺简单,结构形貌良好,具有良好的微流控制作用,满足器件使用要求。更多还原

【Abstract】 The V shaped microdiffluent device was fabricated by using tri-layer resists photolithography technology based on PDMS.The dissolve between different photoresists was well avoided by introducing sacrifice layer technology.And the effect of different developers to different photoresists on the patterning qualities was discussed.The fabrication processing was easy and this device can meet the needs for microfluidic.更多还原