【摘要】 系统介绍了金属诱导横向晶化法、准分子激光晶化法、触媒化学气相沉积法(Cat-CVD)以及电感耦合等离子体化学气相沉积法(ICP-CVD)制备低温多晶硅薄膜的原理及进展。对不同制备工艺的优势和不足进行了比较,重点讨论了Cat-CVD和ICP-CVD在实用化中需克服的技术问题。对上述制备方法的应用前景作了评述和展望。更多还原

【Abstract】 The principles and progress of LTPS preparation methods including metal induced lateral crystallization(MILC),excimer laser annealing(ELA),catalytic chemical vapor deposition(Cat-CVD) and inductively coupled plasma chemical vapor deposition(ICP-CVD) were systematically introduced.Then,the advantages and shortcomings of different processes were compared with each other.Discussed were several problems of Cat-CVD and ICP-CVD in practical applications.Finally,a brief review and application prospect of above-mentioned methods are also presented.更多还原