【摘要】 用直流磁控反应溅射法,分别在Si(111)基片及Al2O3陶瓷基片上制备了ZnO薄膜,并进行TiO2、SnO2、Al2O3或CuO的掺杂和退火处理。用XRD分析了退火前后晶型的变化,利用气敏测试系统对各样品进行了气敏特性测试。结果表明:经过700℃退火后的样品,在最佳工作温度为220℃时,对丙酮有很好的选择性和很高的灵敏度(34.794)。掺杂TiO2或SnO2,可提高ZnO薄膜传感器对丙酮的灵敏度(57.963)。更多还原

【Abstract】 ZnO thin films and ZnO thin films doped with TiO2、SnO2、Al2O3 or CuO were prepared both on Si(111) and alumina ceremic substrates by DC reactive magnetron sputtering,and annealing was carried out.The structures of the thin films unannealed and annealed were studied by XRD,the sensing properties of each sample were tested by gas sensing measurements.The results show that after 700 ℃ annealing,the sample has excellent selectivity and high sensitivity(34.794) towards acetone at 220 ℃ of the optimum operating temperature.And the sensitivity of ZnO thin films sensor to acetone is increased to 57.963 by doping with TiO2 or SnO2.更多还原