【摘要】 把柔性机构的设计方法——伪刚体法应用于柔性微夹钳的设计中,得到一种新结构形式的电热微夹钳,用UV-L IGA方法进行加工制作,并进行动态性能测试.从对称的平面十杆刚性机构得到其伪刚体模型,对伪刚体模型进行优化并柔性化得到放大20倍的柔性微夹钳钳体,通过仿真验证了设计的正确性和可靠性.V形电热驱动器与柔性钳体集成到一起,形成柔性电热微夹钳.用SU-8胶做电铸铸模,钛和二氧化硅做牺牲层,铜做种子层,在氨基磺酸镍电铸液中进行电铸,加工出最小特征尺寸10μm,厚度30μm的电热镍微夹钳.最后对制作的微夹钳在0~1.5 V直流电压下进行动态测试,夹持端位移最大可达24μm.更多还原

【Abstract】 Pseudo-rigid-body method which is one of compliant mechanisms design methods was used to design compliant microgripper,and a new electrothermal microgripper was obtained.The electrothermal microgripper was fabricated with UV-LIGA process,as well as simulated and tested.The pseudo-rigid-body model was created from a symmetrical planar 10-bar linkage.The microgripper form was obtained through optimizing the pseudo-rigid-body model and making the hinge flexibility.This part can generate the desired output displacement,and can magnify the input displacement up to 20 times.V-shaped electrothermal actuator was attached to actuate the microgripper.During the UV-LIGA process,titanium layer and silicon dioxide were used as a sacrificial layer,copper layer was used as a seed layer,and UV-LIGA process was performed by nickel electroplating in a nickel-sulfamate-based solution with SU-8 mold.Finally,a smallest feature size of 10 μm,30 μm thick nickel electrothermal microgripper was fabricated.Dynamic performance of the nickel microgripper was tested within 0-1.5 V voltage range.The maximum displacement between two jaws of up to 24 μm was recorded for this nickel microgripper.更多还原