【摘要】 聚焦离子束技术(FIB)是一种集形貌观测、定位制样、成份分析、薄膜淀积和无掩模刻蚀各过程于一身的新型微纳加工技术。几十年来,随着关键技术的不断突破和完善,得到了前所未有的发展,所突破的关键技术之一就是精密工件台的使用。更多还原

【Abstract】 Focused Ion Beam is an advanced micro/nano technology for figure observation, orientation making-sample, component analysis, film deposition and maskless etching. With the development and breakthrough of FIB key technology for many years, its technology has reach a high level. The one of these key technology is exact technology of workpiece stage. In this paper, the workpiece-stage and control system in focused ion beam equipment are introduced in detail.更多还原