【摘要】 RFMEMS技术在民用和军事方面有巨大的潜力,作为其核心器件的RFMEMS开关很有希望在雷达和通信领域之中成为关键器件。电磁驱动RFMEMS开关具有工作电压比较低,驱动力大,可以工作在恶劣的环境等优点,使其成为近年来RFMEMS开关研究的一个热点。更多还原

【Abstract】 RF MEMS technology has a great potential in the civilian and military applications, switches which are the core of the RF MEMS technology will hopefully become the key device in the radar and communication systems. The electro-magnetically actuated RF MEMS switches have some advantages over the other switches, such as low operating voltage, large driving force, and tolerance to the poor working conditions of dusty, humid, and low temperature, so the study of the magnetic RF MEMS switches has become a hotspot in recent years.更多还原