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CVD金刚石的晶体形态及界面位向关系

Crystal Morphology and Interfacial Orientation Relationship of CVD Diamond

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【Author】 HUANG Yuansheng1, LIU Hongwei2, QIU Wanqi3, LUO Chengping3, CHEN Ling3(1 Department of Mechanical and Electronic Engineering, Shaoguan University, Shaoguan 512005; 2 College of Mechanical Engineering, Guangxi University, Nanning 530004; 3 College of Mechanical Engineering, South China University of Technology, Guangzhou 510640)

【机构】韶关学院机电系；广西大学机械工程学院；华南理工大学机械工程学院；华南理工大学机械工程学院韶关512005；南宁530004；广州510640；

【摘要】综述了CVD金刚石的晶体形态及界面位向关系。用SEM观察CVD金刚石晶粒形态主要有立方体、长方体、八面体、立方八面体、孪晶八面体、十面体和二十面体颗粒以及球形金刚石,讨论了晶粒的形成条件。用TEM观察则主要有单晶体、孪晶八面体和五重孪晶体形态。界面位向关系主要有:Si(001)//Diamond(001),Si<110>//Diamond<110>;Si(111)//Diamond(111),Si<110>//Diamond<110>和Si(110)//Diamond(110),Si[110]//Diamond[111]。更多还原

【Abstract】 The morphology and interfacial orientation relationship of CVD diamond are summarized in combination withs’ research. The morphologies of diamond include cube, cuboid, octahedron, cuboctahedron, twinned cuboctahedron, decahedron and icosahedron and ball-like diamond using SEM observation. The formation condition of the grains is discussed. Three TEM morphologies are observed: single crystal, twinned cuboctahedron and five-fold twined grains. The interfacial orientation relationships mainly include Si (001) // Diamond (001),Si <110>//Diamond <110>;Si (111)//Diamond (111),Si <110> //Diamond <110>, and Si (110) // Diamond (110),Si[110]// Diamond [111].更多还原

【关键词】金刚石；晶体形态；界面位向；
【Key words】 diamond； crystal morphology； interfacial orientation；

【基金】广东省自然科学基金项目(04300026);韶关市科技计划项目(2004-14)

【文献出处】材料导报 ,Materials Review , 编辑部邮箱 ,2007年01期

【分类号】O76
【被引频次】6
【下载频次】322

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