【摘要】 根据无源无线SAW压力传感器的敏感特点,提出了一种具有较高灵敏度的压力传感器结构设计.传感器的受力敏感部分采用简支梁结构,通过分析找到梁的最大应变点,在梁的上下两侧最大应变区域中心对称分布了两个相同的单端口SAW谐振器.由两个SAW谐振器组成差动式测量结构,具有较高的灵敏度,并减少了温度对测量结果的影响,对迟滞效应带来的误差有一定的补偿作用.更多还原

【Abstract】 Based on the sensing characteristic of passive wireless SAW(Surface Acoustic Wave)pressure sensors,a sensitive structure design of SAW pressure sensor is presented.The sensing unit is constructed by freely supported beam.By analyzing the strain distribution on both sides of the beam,two same SAW one-port resonators are arranged centrosymmetrically on the biggest strain area.A difference frequency measurement structure between two SAW one-port resonators has a high sensitivity and a little temperature impact.It also can compensate the hysteresis errors.更多还原