【摘要】 基于谐振式硅微结构压力传感器幅、相频率特性的分析,利用北京航空航天大学微传感器实验室研制的谐振式硅微结构传感器开环测试系统的测试实验结果和Matlab实验数据处理与拟和分析计算,建立了微传感器的二阶模型.该模型排除了未知相位延迟的影响,从幅值和相位混合的测试数据中精确计算出谐振频率、品质因数以及相位特性,为闭环测试系统的研制提供了依据.更多还原

【Abstract】 Based on the analysis of the magnitude and phase freq ue ncy characteristics of the resonant silicon microstructure pressure sensor,expe riment investigation on the open-loop test of resonant sensors,curve fitting a nd data processing with Matlab,a model of the resonant silicon microsensor was described.The resonant frequency,quality factor and phase characteristic of th e sensor can then be calculated without the influence of the unknown phase delay.The obtained results here are of significance to develop the closed-loop syst em of microsensor.更多还原