节点文献
CaF2晶体及加工技术研究
Studies on CaF2 Single Crystals and Its Processing Technique
【摘要】 随着深紫外准分子激光光刻技术的发展,所用CaF2光学晶体镜头材料的加工对传统的冷加工技术提出了挑战。本文结合CaF2晶体的基本性质,对其加工技术进行了极大的改进。通过控制合适的工艺参数,采用特殊的加工方法可以加工出高质量的CaF2光学晶体。
【Abstract】 With the development of far UV quasi-molecule laser lithography technique,the processing of CaF2 optical crystal lens material challenged traditional cool processing techniques.Combined with the fundamental properties of CaF2 crystal,the processing techniques was improved a lot in this study.Experimental results showed that high-quality optical crystals were processed by optimum technology parameters and the special processing method.
- 【文献出处】 长春理工大学学报(自然科学版) ,Journal of Changchun University of Science and Technology(Natural Science Edition) , 编辑部邮箱 ,2007年02期
- 【分类号】O614.231
- 【被引频次】24
- 【下载频次】612