【摘要】 采用直流金属磁过滤阴极真空弧(FCVA)制造出Ti和乙炔(C2H2)气体的双等离子体在单晶硅(100)上制备非晶态碳膜.重点研究了乙炔气体和过滤线圈电流对非晶态碳膜的结构、形貌和机械性能的影响.研究结果表明,薄膜中主要成分是TiC,并以(111)作为主晶向;随着过滤线圈电流的增大,薄膜的晶粒度越来越小;薄膜表面的粗糙度逐渐减小,变得更加平整;薄膜的应力减小,可以下降到2.5 GPa.薄膜的显微硬度和弹性模量随着C2H2体积流qV(C2H2)的增大而降低,硬度和弹性模量分别可以达到33.9 GPa和237.6 GPa.非晶态碳膜的摩擦因数在0.1~0.25之间,大大低于衬底材料单晶硅片的摩擦因数0.6.随着过滤线圈电流增大,摩擦因数减小.更多还原

【Abstract】 Direct current metal filtered cathodic vacuum arc（FCVA） and acetylene gas（C₂H₂） are wielded to synthesize amorphous carbon films on Si（100）.The influence of acetylene flow rate on the microstructure,morphology and mechanical properties of the films are investigated.The results show that the phase of TiC in the（111） preferential crystallographic orientation is embedded in the film;with an increasing filter coil current,the grain size of film gradually becomes smaller and the content of TiC phase gradually reduces;the RMS roughness of film is smaller;the stress of film gradually becomes smaller and the value of stress could reduce to 2.5 GPa in our experiment.The micro-hardness and elastic modulus of film decrease with an increasing acetylene flow rate,and the value of them can reach to 33.9 GPa and 237.6 GPa,respectively.The friction coefficients of the amorphous carbon films are within a range of 0.1～0.25,which are much lower than the friction coefficient of the substrate Si（0.6）. And with the increasing filter coil current,the friction coefficient of the film reduces.更多还原