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一种新型金属封装的光纤法珀温度传感器
Novel Fiber Optic Fabry-Perot Temperature Sensor Based on Steel Capillary Encapsulation
【摘要】 设计制作了一种金属封装的光纤法珀温度传感器,该传感器采用不锈钢毛细金属管代替传统的空心光纤对光纤法珀腔进行封装,毛细金属管在作为法珀腔腔体的同时也是温度敏感元件。采用该结构简化了光纤法珀温度传感器的封装工艺,理论分析和实验的结果表明,该金属封装结构使得传感器的灵敏度易于控制,对于腔长为10mm的温度传感器其精度达到±0.5℃。
【Abstract】 A novel Fabry-Perot temperature sensor based on steel capillary encapsulation was proposed.A stainless steel capillary was used instead of the traditional hollow center optical fiber for the FabryPerot cavity,and it acted as the sensing element.Thus the craft of the fabrication was simplified.Both the theoretical analysis and experimental results show that the sensitivity of the sensor is easy to control,and the sensitivity reaches to ±0.5 ℃ of the sensor with gauge length of 10 mm.
- 【文献出处】 微纳电子技术 ,Micronanoelectronic Technology , 编辑部邮箱 ,2007年Z1期
- 【分类号】TP212.14
- 【被引频次】13
- 【下载频次】310