【摘要】 基于Synopsys Inc.最新推出的新一代nm级IC制程工艺设计工具--SenTaurus Process,实现了CMOS架构的nm级NMOS制程的工艺级可制造性设计。仿真结果体现了SenTaurus Process的强大功能和使用SenTaurus Process进行工艺级可制造性设计的必要性。更多还原

【Abstract】 Based on the elementary functions of the new generation nano-level IC process design tool:SenTaurus Process issued recently by Synopsys Inc,nano-level NMOS process level DFM based on CMOS framework was realized. Simulated results reveal the powerful functions of SenTaurus Process and the necessity of technology-level design for manufacturing using SenTaurus Process.更多还原