【摘要】 为实现多隧道结和多岛结构,针对室温大气环境下,利用AFM阳极氧化加工方法,对加工LT-GaAs衬底上的nm级厚度的钛膜的重复性进行了研究。本实验在一定的加工条件下,分别加工了点阵列和线阵列,通过最大残差法计算了它们宽度和高度的重复性百分比,得到所有的重复性百分比都小于1%,表明文中所提供的加工条件下,加工钛膜具有很好的重复性。同时,通过点阵列与线阵列的理论变换方法,进一步验证了在加工氧化钛线时采用0.1μm/s扫描速度的正确性。更多还原

【Abstract】 The reproducibility of AFM anodic oxidation at room temperature in air was studied and analyzed for the structure of multi-tunneling junctions and multi-islands.Under a certain condition,the lattice and line array was made on the nanometer titanium of the LT-GaAs substrate and their height and width were calculated by the method of maximum surplus error.The results are all less than 1%.This indicates that the surface of the titanium metal is oxidized well by AFM anodic oxidation under the processing conditions.The scanning speed 0.1 μm/s is approved to be right by the theoretical transform between the lattice and line array.更多还原