节点文献
多层金属化系统中的蓄水池效应
Reservoir Effect in Multi-Layer Metal System
【摘要】 对于W通孔多层金属化系统来说,金属离子蓄水池效应对其电迁移寿命的影响很大。设计了12种不同的蓄水池结构,并进行电迁移实验;考察了蓄水池面积、通孔位置、数目及大小等对互连线的电迁移寿命的影响,得出蓄水池的面积是影响电迁移寿命的主要因素。
【Abstract】 Metal iron reservoirs in multi-layer metal system with W via have great effects on the electro-migration lifetime.12 samples with different reservoir structures were designed for the electro-migration test.The effect of reservoir area,via displace,amount and size on electro-migration lifetime was concluded,and it is revealed that reservoir area is the key factor affecting electro-migration lifetime.
【基金】 电子元器件可靠性物理及应用技术国防科技重点实验室资助项目(51433020305QT0101)
- 【文献出处】 半导体技术 ,Semiconductor Technology , 编辑部邮箱 ,2007年04期
- 【分类号】TN305
- 【被引频次】1
- 【下载频次】73