【摘要】 介绍了一种比较成熟的矩形微米流道(微槽道)加工工艺,利用厚胶光刻工艺在硅片上制备胶模板,进而在该模板上用高分子聚合物PDMS(Polydimethylsiloxane,聚二甲基硅氧烷)制作了微米量级的微槽道(高、宽范围20~100μm),对制备的微槽道的几何精确度进行了20×100倍放大显微观测,对其流量特性进行了实验测定.实验结果与泊肃叶理论公式(NS方程的管流表达式)相对比,可以看到在微米量级的矩形微流道中,泊肃叶公式仍然适用.更多还原

【Abstract】 According to the author’s experiment practices,this paper gives one kind of mature manufacture methods of making rectangular micro-tubes with PDMS(Polydimethylsiloxane).The outlets and the inlets for liquid flowing across the rectangular micro-tubes were designed especially after many times of experiments. With the soft lithography technology,a silicon mode plate was made.After this,some rectangular micro-tube structures(with widths and highs of 20-100μm)were made on the plate surface with PDMS concretion.The geometrical precisions of these micro-tubes were observed with a 20×100 microscope,besides that,with given pressures,fluxes quantities passing through the rectangular micro-tubeswere measured.The results of these experiments were compared with the results of HP(Hagen-Poiseuille) equation which is one simplified shape of NS(Navier-Stokes) equation.In the end,the HP equation was found to be still applicable to rectangular micro-tubes.更多还原