【摘要】 三氟乙酸盐-金属有机沉积技术(TFA-MOD)是制备钇钡铜氧涂层导体的有发展前景的方法之一。采用TFA-MOD技术在铝酸镧单晶基片上制备出YBa2Cu3O7-x涂层导体,并对不同烧结温度下制备的薄膜作了分析比较,找到了较为合适的烧结温度。用X射线衍射进行了物相的定性分析,由YBCO薄膜的(103)扫描图谱分析了薄膜的外延生长,用原子力显微镜观察了薄膜表面形貌。结果表明制备出的YBCO薄膜表面均匀致密、无明显裂纹、有较强的(00l)衍射峰。更多还原

【Abstract】 The metal organic deposition（MOD） of YBa₂Cu₃O_7-x（YBCO） using metal trifluoroacetate（TFA） precursor is considered to be a strong candidate as a low-cost fabrication process in coated conductors.YBCO was fabricated on LAO（001） substrate by TFA-MOD,and to find the best sintering temperature,YBCO films fabricated at different sintering temperatures were compared.Crystal phase in the film was detected by X-ray diffraction（XRD）.The microstructure of the YBCO was characterized by AFM.The results show that YBCO films on LAO substrate with the c-axis grain orientation,dense surface and no crack are obtained.更多还原