【摘要】 本文总结了涡旋真空泵的工作原理、设计原则与经验、制造要点和使用注意事项;介绍了涡旋真空泵的设计与加工方法;讨论了涡旋盘的加工、密封的设计与选择、间隙的确定以及泵体的动平衡等问题并阐明这些问题是影响泵性能指标的几个重要因素;同时指出了涡旋真空泵使用的几个注意事项。更多还原

【Abstract】 The operating principle,design principle/experience,keys to manufacturing and cautions in operation of a scroll vacuum pump are generalized,with the design and fabrication of a scroll pump introduced.Discusses the processing of scroll disk sealing,design and choice of sealing material,determination of clearance between fixed and orbiting scroll disks and the dynamic balance of pump,and they are proved the key factors influencing pump performance.Some cautions are proposed that the gas ballest and isolating valve are needed to pay attention in pump operation.更多还原