【摘要】 在Ar、N2混合气氛中,通过双靶反应磁控溅射方法制备了一系列不同Si含量的Zr-Si-N复合薄膜,采用EDS、XRD、SEM、AFM和微力学探针表征了复合膜的成分、相组成、微结构和力学性能。结果表明:随着Si的加入,Si3N4界面相形成于ZrN晶粒表面并阻止其长大。低Si含量下,晶粒的细化使Zr-Si-N薄膜得到强化,在Si含量为6.2at%时其硬度和弹性模量分别达到最高值29.8 GPa和352 GPa。继续增加Si的含量,薄膜逐渐向非晶态转变,同时产生ZrxSiy相,并伴随有明显的力学性能降低。Zr-Si-N薄膜力学性能增加受到限制,可能与Si3N4界面相和ZrN晶粒之间的低润湿性有关。更多还原

【Abstract】 A series of Zr-Si-N composite films with different Si contents were grown in an atmosphere of Ar and N₂ mixture by reactive magnetron sputtering of a bi-target.The films were characterized with energy dispersive spectroscopy（EDS）,X-ray diffraction（XRD）,scanning electron microscopy（SEM）,atomic force microscopy （AFM） and nano-indentation.The results show that Si contents significantly affect its mechanical properties.Addition of Si results in formation of Si₃N₄ on ZrN grain surfaces,which prevents the grains from growing.As Si content decreases,the strength of the Zr-Si-N films increases.For instance,with a Si content of 6.2at%,both its hardness and its elastic module reach the maxima,29.8 GPa and 352 GPa,respectively,possibly because of small size of the ZrN grains and of existence Si₃N₄ at the interfaces.While Si contents increases higher than 6.2at%,crystalline Zr-Si-N composite films turn into amorphous films with decreasing mechanical properties possibly because of the low wettability of Zr_xSi_y at the ZrN grain interfaces.更多还原