【摘要】 试验研究了UV-LIGA各工艺环节(包括前后烘、曝光、显影、去胶、电铸等)对金属基片上制造金属微结构器件质量的影响,并组合优化了操作条件和工艺参数。试验结果表明:采用优化后的UV-LIGA工艺条件,制造出的金属微结构器件(如微齿轮、微流道)轮廓清晰,表面质量好,无明显缺陷,与基底结合良好。更多还原

【Abstract】 This paper studied experimentally the influences of processing steps of UV-LIGA,including before & post exposure bake,exposure, development,resist removal,micro electroforming,on the quality of micro-structures & micro-devices fabricated on metal-substrate,and optimized their operation conditions and processing parameters.Experimental results indicate that the metal micro-structures & micro-devices such as microgear and micro flow channel fabricated by the optimized UV-LIGA processes has clear contour,good surface quality and excellent linkage with substrate,and it has not visible defects.更多还原