【摘要】 利用高分辨透射电子显微镜和原子力显微镜观察了含SiO2纳米颗粒溶液冲蚀硅片的表面损伤,考察了纳米颗粒碰撞单晶硅片所导致的微观物理损伤。结果表明,硅片经历一定时间冲蚀后,表面可见纳米尺度的凹坑和划痕,并发现一定厚度的非晶损伤层。抛光液粘度从1.2m Pa.s增加到16m Pa.s时,冲蚀后硅片表面损伤逐渐变得轻微,对应的表面凹坑最大深度从4nm减小到0.5nm,表面损伤层厚度从约12nm减小到4nm。更多还原

【Abstract】 An experiment on cylindrical liquid jet containing de-ionized water and SiO₂（nanoparticles） impacting obliquely on a single crystal silicon surface at a speed of 50 m/s was（performed）.The microstructure of the impacted silicon surface was examined through a high resolution transmission electron microscopy and an atomic force microscopy.Experimental results show that（craters） and scratches in the nano-scale can be found in the surface and an amorphous damage layer（occurs） after the impact.When the viscosity of slurry increases from 1.2 m（Pa·s） to 16 m（Pa·s）,with the exposure time of 30 minutes,the maximum crater depth changes from 4 nm to 0.5nm and the damage layer becomes thinner.更多还原