【摘要】 通过对37单元Mems变形镜面形的测量得到了变形镜的电压-位移静态曲线。通过对自适应光学微变形反射镜理论研究推导和实验测试,导出了变形反射镜光学影响函数的矩阵并由此得到电压控制矩阵,从而利用控制电压校正了变形镜的初始面形,为系统波前畸变校正提供了与理论相一致的实验依据。对变形镜校正能力进行了测评,为今后全面优化设计微变形反射镜及其更完美的适应自适应光学系统的需要提供了实验数据与理论支持。更多还原

【Abstract】 The static deformation function as the applied voltage was measured for the MEMS deformable mirror with 37-cha nnel actuators.The optical influence function matrix of mirror was also obtained through the theoretical analysis and experiment m easurement.As a result,the initial mirror deformation could be corrected by applying corresponding control voltages to mirror,thus providing an experimental guidance for the wavefront aberration correction.Finally,the correction ability of mirror was also tested for the further design optimization for mirror and adaptive optical system.更多还原