【摘要】 振动式硅微陀螺仪要在各种噪声干扰下,检测出极其微弱的有用信号。随着硅微陀螺性能的不断提高。机械热噪声对微陀螺的影响愈加显著,决定了振动式硅微陀螺的极限分辨率。本文给出了机械热噪声的产生机理,推导得出机械热噪声等效角速率表达式。分析表明,提高微陀螺的品质因数、增大质量和谐振频率可减小机械热噪声。更多还原

【Abstract】 Vibratory silicon micromachined gyroscopes need to check extremely small signal from all kinds of noises. With the improvement of performance in micromachined gyroscopes, the effects of mechanical-thermal noise on gyros are important, and mechanical-thermal noise defines the limit of resolution in micromachined gyros. In this paper, we present the mechanism of mechanical-thermal noise, and derive the expressions of equivalent rotation rate due to mechanical-thermal noise. The analysis reveals that the improvement of quality factor, increment of mass and resonance frequency can decrease mechanical-thermal noise.更多还原