【摘要】 建立了某硅微陀螺仪的等效电路,分析了寄生电容对接口电路的影响。结果表明,合理的接口电路不仅消除了大部分寄生电容的影响,而且减小了信号的衰减幅度,抑制了大部分的耦合信号和噪声信号。最后对接口电路进行了改进,保留了以上的优点,减小了载波信号的变化和电源变化对分辨率的影响,提高了整个电路的分辨率。更多还原

【Abstract】 The equivalent circuit of a silicon micromachined gyroscope was established.The impacts of the parasitic capacitances on interface circuit were analyzed.The analytic results indicate that the reasonable interface circuit can remove the impacts of these parasitic capacitances mostly and reduce the signal attenuation,restrain the noise signal and coupling signal.Finally the interface circuit was improved.It reduces the impacts of the changes of carrier wave and power supply on resolution and improves the resolution of the circuit.更多还原