【摘要】 介绍了一种适用于微流体系统的无阀微泵。该微泵利用聚二甲基硅氧烷(PDMS)作为泵膜,利用硅各向异性腐蚀形成扩散口/喷口结构,并利用压电双晶片作为驱动部件。该微泵的制作工艺简单,使用寿命长,具有良好的液体驱动性能。对于使用15 mm长的压电双晶片作为驱动器的压电无阀微泵,在100 V6、0 Hz、占空比为1的方波驱动下,最大流速可达151μL/min。更多还原

【Abstract】 A valveless micropump suitable for microfluidic system is presented.This micropump utilizes polydimethylsiloxane(PDMS) as diaphragm,a diffuser and a nozzle unit is formed by anisotropic etching of bulk silicon,and a piezoelectric bimorph is used as the actuator.This micropump is easy to fabricate and has a long lifetime.It can actuate liquid stably.For a micropump which has a 15 mm long piezoelectric bimorph as the actuator,a maximum flow rate of 151 μL/min can be realized with 100V,60 Hz square wave signal which has duty ratio of 1:1.更多还原