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Ni⁺注入BiB₃O₆晶体光波导的折射率分布

The Refractive Index Profile of the Optical Waveguide Formed by MeV Ni⁺ Ion Implantation into BiB₃O₆ Crystal

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【Author】 TENG Bing~1,CHEN Feng~2,WANG Ji-yang~3,DONG Sheng-ming~3,WANG Zheng-ping~3 (1.Dept.of Physics,Qingdao University,Qingdao 266071,China;2.Dept.of Physics,Shandong University,Jinan 250100,China3.State Key Lab.of Crystal Materials,Shandong University,Jinan 250100,China)

【机构】青岛大学物理系；山东大学物理系；山东大学晶体材料国家重点实验室；山东大学晶体材料国家重点实验室山东青岛266071；山东济南250100；

【摘要】在室温下,采用BiB3O6晶体,切向沿着(111)晶面方向制成大小为6 mm×8 mm×1.5 mm晶体样品。首次采用能量3.0 MeV、剂量为1×1014ions/cm2的Ni+注入到BiB3O6样品的抛光面,形成平面光波导。注入过程中,样品表面法线方向与入射离子束方向成7°角。采用的氦氖激光器的工作波长为632.8 nm,用棱镜耦合法观察波导的暗模特性,测量每个导模的有效折射率。更多还原

【Abstract】 Planar optical waveguide was first formed in BiB₃O₆ sample by 3.0 MeV Ni⁺ ion implantation with a dose of 1×10¹⁴ ions/cm² at room temperature.The sample crystal used in this experiment was with a size of（6 mm×）8 mm×1.5 mm and it was cut along （111） plane and optically polished.The sample was tilted by 7° off the beam direction during the ion implantation.A laser beam with 632.8 nm from a He-Ne laser was used in the measurement.The dark modes were observed by prism coupling method.The refractive index profile of the BiB₃O₆ waveguide was simulated using reflectivity calculation method.更多还原