【摘要】 采用溶胶-凝胶工艺与原位生长技术,制备了ZnSe/SiO2复合薄膜。X-射线衍射(XRD)分析表明,ZnSe/SiO2复合薄膜中ZnSe晶体为闪锌矿(立方ZnS)。利用椭偏光谱仪测量了不同ZnSe含量的ZnSe/SiO2复合薄膜的椭偏参数Δ与波长λ的色散关系,采用Maxwell-Garnett(MG)有效介质理论对薄膜的光学常数、厚度、气孔率、ZnSe的浓度进行了计算。结果表明,单层ZnSe/SiO2薄膜厚度在300 nm以上时,随着溶胶体系Zn2+、SeO42-浓度的增加而增大,气孔率在30%左右,ZnSe含量约为溶胶体系中Zn2+、SeO42-浓度的1/2;通过MG有效介质理论的计算表明,可以通过调整旋涂次数及Zn2+、SeO42-浓度来调整薄膜的厚度和ZnSe/SiO2的摩尔比率,可在工艺上控制ZnSe/SiO2复合薄膜光学参数。更多还原

【Abstract】 The ZnSe/SiO₂ composite thin films were prepared by Sol-Gel process and in-situ growth technique under carbon monoxide condition.XRD analysis reveals that the structure of ZnSe phase is sphalerite（cubic ZnS）.Spectroscopic Ellipsometers has been used to investigate the dependence of Ellipsometric angle Δ with wavelength λ.The optical constant,thickness,porosity and the concentration of ZnSe of ZnSe/SiO₂ composite thin films have been calculated according to maxwell-garnett（MG）effective medium theory.The fitting results shown that the thickness,the porosity and the molar ratio of ZnSe/SiO₂ are over 300 nm,30%（V/V）,1/2 of the molar ratio of Zn²⁺/TEOS in original solution,respectively.The thickness increases with the increases of Zn²⁺、SeO^2-₄ concentration in solution.All calculated results revealed that we can adjust the thickness and the molar ratio of ZnSe/SiO₂ through adjusting spin-coating times and the concentration of Zn²⁺、SeO^2-₄ in solution,which is valuable to control the optical properties of ZnSe/SiO₂ composite thin films.更多还原