【摘要】 压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一。该文采用ANSYS有限元软件对压电膜片结构参数和在微执行器上的装配方法进行了优化设计,得到PZT/Si,PZT/Cu压电膜片结构的优化数据,将其应用于有阀微泵的研制。经测试,微泵压电驱动效果与仿真结果一致,微泵背压可达836 Pa,流量达1.4 mL/min。更多还原

【Abstract】 Piezoelectric actuator is one of the most development prospects in MEMS actuators.Based on ANSYS,finite element method software,the assemble methods and structure parameters of piezoelectric diaphragm were designed and optimized.The optimized parameters for structures of PZT/Si and PZT/Cu were obtained and used in fabrication of the micopump with valve.The simulation of piezoelectric actuator effect of the micropump is in accord with the results of the test.The back pressure of the micropump is 836 Pa,and flux is 1.4 mL/min.更多还原