【摘要】 随着现代工业对材料表面涂层的要求不断提高,Ti-Si-N膜以其独特的纳米复合结构、超硬性及其他优异的力学性能成为研究的热点。本文综述了Ti-Si-N纳米复合膜的制备工艺以及工艺参数对Ti-Si-N膜的微观结构与力学性能的影响。更多还原

【Abstract】 With the increasing requirements on surface coating by modern industry, the research on Ti-Si-N coating has drawn much attention due to its unique nanocomposite microstructure, superhardness and other excellent mechanical properties. The preparation technology of Ti-Si-N film and influences of processing parameters on the microstructure and mechanical properties are introduced.更多还原