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掺铝氧化锌(AZO)导电薄膜的研究进展
Recent Resaerch on AZO Conducting Films
【摘要】 综述透明导电薄膜的性能、种类、制备工艺、研究及应用状况,重点讨论掺铝氧化锌(AZO)薄膜的结构、导电机理、光电性能和当前的研究焦点。并指出,为了进一步提高透明导电薄膜的性能,应从以材料选择、制备工艺、多层膜光学设计等方面深入研发,以满足尖端技术的需要。
【Abstract】 The properties, varieties, preparation technologies, recent research advances on transparent and conducting films and their applications in various fields are described. Structure, electric mechanism, photoelectric properties and investigation focus of AZO film are emphasized. The properties of transparent and conducting films should be improved combined with optimized materials, researches on preparation technologies and multilager design in order to meet the spiry technology.
【关键词】 透明导电膜;
掺铝氧化锌薄薄;
多层膜设计;
【Key words】 transparent and conducting film; AZO films; multilager design;
【Key words】 transparent and conducting film; AZO films; multilager design;
- 【文献出处】 现代显示 ,Advanced Display , 编辑部邮箱 ,2006年03期
- 【分类号】TM24
- 【被引频次】12
- 【下载频次】638