【摘要】 研制了一台集低能电子点源显微镜和场发射显微镜于一体的设备。研制的过程中,解决了包括超高真空的获得,外界振动的隔离,爬行器及其控制电路的设计,场发射电流-电压自动测量,超高真空换样等一系列问题。利用该设备,获得了放大倍数大于104的投影像,并且测量了单根多壁碳纳米管的场发射特性。更多还原

【Abstract】 A facility has been developed that can function as a low-energy electron point source(LEEPS) microscope or a field-emission microscope(FEM).During the development,the following problems were tackled: the obtainment of ultrahigh vacuum(UHV),the isolation of external vibration,the design of the inch-worm and its controlling circuit,automatic measure-ment of the curves of field emission current versus applied voltage(I-V curves) and sample transfer in UHV,etc.In the initial run,projection images with a magnification larger than 104 were achieved and I-V curves of a multiwalled carbon nanotube(MWCNT) were also acquired.更多还原