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基于MEMS的无阀泵的数值仿真与参数设计
Numerical Simulations and Parameters Design of Valveless Pumps Based on MEMS
【摘要】 扩张管和收缩管的流量和效率是无阀泵工作性能的决定因素,运用有限元分析软件Ansys/Flotran,对扩张管和收缩管的结构对流量和效率的影响进行了数值分析,计算结果表明,入口修圆的扩张管和收缩管的流动特性优于常规结构的扩张管和收缩管,随着最小宽度的增加,流量逐渐增大,但效率存在一个最大值点。较小的压差下大一些的扩张角有利于流量和效率的提高,随着压差的增大,就要选择小一些的扩张角,以避免扩张管中发生边界分离现象。较大的深度有利于提高流量和效率,而长度对流量、效率的影响不大。
【Abstract】 The mass flow and efficiency of diffuser/nozzle are decisive factors of the valveless pump performances.The Computational Fluid Dynamics software Ansys/Flotran was used to numerically analyze the effects of its structure on the mass flow and efficiency.The results indicate that the flow characteristics of the diffuser/nozzle with a round entrance are better than that of the common diffuser/nozzle,the mass flow increases and the efficiency has a maximum value when its minimum width is increased.Simultaneously,the results also show that a big expanding angle benefits improvement of its mass flow and efficiency when the pressure difference is low and a small expanding angle must be chosen with increasing of the pressure difference to avoid occurrence of boundary separation,and a big depth benefits to improve the mass flow and efficiency and its length has little effect on the mass flow and efficiency.
【Key words】 MEMS; valveless micropump; numerical simulation; parameters design;
- 【文献出处】 微细加工技术 ,Microfabrication Technology , 编辑部邮箱 ,2006年05期
- 【分类号】TH703
- 【被引频次】7
- 【下载频次】128