【摘要】 简述了获得极紫外光源的途径,系统介绍了激光等离子体(LPP)光源的发展历程,对当前Cymer公司研制的极紫外光刻设备所需LPP光源的最新研究进展做了详细阐述,最后对光源的整体发展给予了总结和展望。更多还原

【Abstract】 The production of Extreme Ultraviolet(EUV) was introduced.Simultaneously,the development of the laser produced plasma(LPP) sources was systemically described and the last development of Cymer’s LPP sources for EUV Lithography was reviewed in detail.Finally,a summary was given and some prospects for EUV source research were proposed.更多还原