【摘要】 介绍一种矩形反应腔体结构的表面波等离子体源,通过对垫层介质及天线结构的优化设计,产生了大面积均匀的等离子体.采用静电探针测量了等离子体参数(密度,电子温度)在不同运行条件(气压,功率)下的空间分布;采用扩散模型,数值模拟了等离子体密度在垂直方向上的空间分布,并比较好地解释了实验测量结果.更多还原

【Abstract】 Property of rectangular structure surface wave plasma was reported.Large-area uniform and high density plasma was produced by the optimization of slot antenna and the shape of dielectric plates.Plasma density and electron temperature for different operation conditions were measured by a Langmuir probe.Profile of plasma density along the vertical direction was modeled by a diffusive model,and the simulation result can be used to interpret qualitatively the measurement value very well.更多还原