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用卢瑟福背散射/沟道技术研究ZnO/Zn_0.9Mg_0.1O/ZnO异质结的弹性应变

Depth-dependent elastic strain in ZnO/Zn_0.9Mg_0.1O/ZnO heterostructure studied by Rutherford backscattering/channeling

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【Author】 Wang Kun~ 1) Yao Shu-De~ 1) Hou Li-Na~ 1) Ding Zhi-Bo~ 1) Yuan Hong-Tao~ 2) Du Xiao-Long~ 2) Xue Qi-Kun~ 2) 1)(School of Physics, Peking University, Beijing100871,China)2)(State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of SciencesBeijing,100080,China)

【机构】北京大学物理学院；中国科学院物理研究所表面物理国家重点实验室；中国科学院物理研究所表面物理国家重点实验室北京100871；北京100871；北京100080；

【摘要】利用卢瑟福背散射/沟道技术对射频等离子体辅助分子束外延法生长在蓝宝石衬底上的ZnO/Zn0·9Mg0·1O/ZnO异质结进行了组分分析,并得到了异质结弹性应变随深度的变化,应变由界面向表面逐渐释放,并由负变正,且在ZnO与Zn0·9Mg0·1O界面处轻微增大.负的应变是由于ZnO与衬底的晶格失配和热失配,而逐渐变为正值是Zn0·9Mg0·1O与ZnO的晶格常数差异及弹性应变的逐渐释放所致.更多还原

【Abstract】 ZnO/Zn0.9 Mg0.1 O/ZnO heterostructure was grown by radio frequency plasma-assisted molecular beam epitaxy on a sapphire （0001） substrate. By using RBS/C, the depth-dependent elastic strain was deduced. The strain changes from negative to positive from interface to surface, and the value is higher at the depth close to the interface （also at the interface between ZnO and Zn0.9 Mg0.1 O） and decreases towards the surface. The negative tetragonal distortion was explained by considering the lattice mismatch and thermal mismatch between ZnO and sapphire substrate, and the positive distortion is due to the tensile strain in the parallel direction of Zn₀.9 Mg₀.1 O and the gradual release of the strain.更多还原