【摘要】 介绍了近十年来扫描探针显微术(SPM)在巯醇自组装单分子膜纳米刻蚀中的应用.依据扫描探针的工作原理,依次讨论了扫描隧道显微镜、原子力显微镜和导电原子力显微镜的工作特点和适用范围.同时也讨论了自组装单分子膜纳米刻蚀术在生物分子传感器、超高密度信息存储等领域的应用前景.更多还原

【Abstract】 Recent progress in the field of nanolithography of self-assembled monolayers by scanning probe microscopy(SPM), which is important in microelectronics and sensor technology, is introduced in the paper. According to the working principle, scanning probe lithography (SPL) can be classified into three categories, namely STM-based nanolithography, AFM-based nanolithography, and C-AFM-based nanolithography. SPL is a pivot of the fundamental study in the field of nanolithography for its high spatial resolution, ease in fabrication and good controllability in operation. The possible application in information storage has been discussed as well.更多还原