【摘要】 在半导体器件的生产过程中需要定期测量扩散炉、合金炉的恒温区段,针对人工测量效率低,精度差等问题,设计了基于LabVIEW虚拟仪器的恒温区自动测量系统,阐述了系统的组成和测量原理。更多还原

【Abstract】 In a semiconductor device production line, the constant temperature segment of a diffusion furnace have to be measured regularly. And the working efficiency and precision is low. In stead of this manually system, an automatic constant temperature mea- surement system basing on the virtual instrument has been designed. The configuration and principle of the auto- measure system is given in the paper.更多还原