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高度c轴取向的ZnO膜的低温水热法制备
Low-temperature Hydrothermal Growth of Oriented [0001] ZnO Film
【摘要】 在预先镀有ZnO纳米层的(0001)蓝宝石衬底上利用低温水热法制备出ZnO薄膜。SEM和XRD显示此ZnO膜是由六棱柱状阵列构成的,基于蓝宝石衬底生长,具有高度的c轴择优取向,且(0004)摇摆曲线的FWHM达到1.8°。并发现了在水热溶液中加入一定量六次甲基四胺可以调节六棱柱状ZnO尺寸比例。
【Abstract】 Well-aligned ZnO films have been prepared by using low-temperature hydrothermal approach on(0001) sapphire substrates pre-coated with a ZnO nano-layer by dip-coating. The characterization results by scan-ning electron microscopy (SEM) and X-ray diffraction (XRD) indicate that the ZnO films consist of hexagonal rodsgrowing along c axis based on sapphire substrates. The size of ZnO rods could be adjusted by an aqueous solutionwith methenamine.
【关键词】 ZnO阵列膜;
水热法;
(0001)蓝宝石衬底;
【Key words】 ZnO arrays; hydrothermal approach; (0001) sapphire substrates;
【Key words】 ZnO arrays; hydrothermal approach; (0001) sapphire substrates;
【基金】 国家重点基金资助项目(No.50532100);上海市科学技术委员会;上海半导体导体照明工程技术研究中心资助课题(No.05dz1106)。
- 【文献出处】 无机化学学报 ,Chinese Journal of Inorganic Chemistry , 编辑部邮箱 ,2006年03期
- 【分类号】O614.241
- 【被引频次】9
- 【下载频次】362