【摘要】 采用射频磁控溅射在玻璃基片上沉积具有紫外吸收CeO2-TiO2混和薄膜。通过制备一系列不同物质的量浓度比的n(CeO2)∶n(TiO2)靶材(1.0∶0,0.90∶0.10,0.80∶0.20,0.70∶0.30,0.60∶0.40,0.50∶0.50,0.40∶0.60,0.30∶0.70,0.20∶0.80,0.10∶0.90,0∶1.0),研究其紫外吸收性能最佳的物质的量浓度比。TiO2加入CeO2后,改变CeO2的结晶状态并提高UV吸收。采用Raman和XPS表征薄膜的特性,物质的量浓度比值在n(CeO2)∶n(TiO2)=0.5∶0.5,0.6∶0.4时,薄膜为非晶态,并具有高的紫外吸收(98%)和可见光透过率(70%~80%);XPS分析表明薄膜存在Ce4+,Ce3+和Ti4+。更多还原

【Abstract】 Ultraviolet ray（UV） absorbing coating consisting of a complex oxide of cerium andtitanium was deposited on glass substrates by RF sputtering.These films were deposited at different molar ratio CeO₂-TiO₂ targets of CeO₂ to TiO₂（（1.0∶0）,0.90∶10,0.80∶0.20,0.70∶0.30,0.60∶0.40,0.50∶0.50,0.40∶0.60,0.30∶0.70,0.20∶0.80,0.10∶0.90,0∶1.0）.Addition of TiO₂ to CeO₂ changed the crystallinity and coordination state of CeO₂ and improved UV absorption.These films were characterized by Raman spectroscopy,and X-ray photoelectron spectroscopy and spectrometer.The amorphous phases composed of n（CeO₂）∶n（TiO₂）（0.6∶0.4,0.5∶0.5） played an important role in absorbing UV（98%）with high visible light（70%～80%）.XPS analysis indicated that tetravalent Ce⁴⁺,Ti⁴⁺ and trivalence Ce³⁺ were present in the films.更多还原